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MEMS Oscillator

Silicon Labs Si504 MEMS Oscillator

Published
08/01/2014
Product code
SP14147
Price
EUR 2 990
Applications
Available sample Available flyer Ask for info

The frequency control market is largely dominated by quartz products, but silicon timing solutions have a strong value proposition for some sub-markets.

The Si504 is the first silicon oscillator from Silicon Labs. Manufactured with the CMEMS process (CMOS + MEMS), the crystal elements are replaced by micromachined semiconductor resonators.

CMEMS process consists in a monolithic integration of a CMOS circuit with Poly-SiGe (polycrystalline silicon-germanium) MEMS resonator structures.

The resonator is then vacuum encapsulated with a silicon cap using an eutectic wafer bonding process.

The Si504 is optimized to support high-volume, low-cost applications such as consumer electronics market.

This report will provide a complete teardown of the MEMS oscillator with:

  • Detailed photos
  • Material analysis
  • Schematic assembly description
  • Manufacturing Process Flow
  • In-depth manufacturing cost analysis
  • Supply chain evaluation
  • Selling price estimation
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Glossary

Overview/Introduction

  • Executive Summary
  • Reverse Costing Methodology

 Silicon Labs Company Profile

  • Silicon Labs Profile
  • Si504 Characteristics

 Physical Analysis

  • Physical Analysis Methodology
  • Package
  • Package View, Dimensions & Pin-out
  • Package X-Ray
  • Package Opening
  • Package Cross-Section
  • Die
  • View, Dimensions & Marking
  • MEMS Cap Removed
  • MEMS Cap Details
  • MEMS Resonator Structure
  • CMEMS Delayering & IC Process
  • MEMS Cap Cross-Section
  • CMEMS Cross-Section
  • IC Layers
  • MEMS Layers

Manufacturing Process Flow

  • Global Overview
  • CMOS Front-End Process
  • MEMS Resonator Process Flow
  • MEMS Cap & Assembly Process Flow
  • Wafer Fabrication Unit
  • Packaging Process Flow & Assembly Unit

 Cost Analysis

  • Main steps of economic analysis
  • Yields Hypotheses
  • CMOS Front-End Cost
  • MEMS Resonator Front-End Cost
  • MEMS Cap Front-End Cost
  • CMEMS/Cap Assembly Cost
  • MEMS Front-End Cost per process steps
  • MEMS Front-End: Equipment Cost per Family
  • MEMS Front-End: Material Cost per Family
  • Total Front-end Cost & Price
  • Back-End 0 : Probe Test & Dicing
  • Wafer & Die Cost
  • Back-End : Packaging & Final Test Cost
  • Si504 Component Cost

 Estimated Price Analysis

  • Silicon Labs Financial Ratios
  • Si504 Estimated Price

 

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