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MEMS IMU/Combo

Murata SCC2000 Series

Published
04/11/2015
Product code
SP15241
Price
EUR 3 290
Applications
Automotive
Available sample Available flyer Ask for info

Murata SCC2000 series sensors are combined accelerometer and gyroscope devices aimed at use in tough environments such as those encountered in automotive and industrial applications. The SCC2000 series has best in class temperature dependency, shock sensitivity and bias stability characteristics and consists of a low-g 3-axis accelerometer with two angular rate sensor options of either X or Z-axis detection.

The SCC2000 series features independent acceleration and angular rate sensing elements manufactured with Murata proprietary High Aspect Ratio (HAR) 3D-MEMS process and using SOI and cavity-SOI (c-SOI) substrates. A single ASIC produced with an advanced BCD process is used.

The acceleration sensing element consists of four acceleration sensitive masses and the angular rate sensing element consists of moving masses that are purposely exited to in-plane drive motion.

The SCC2000 devices are packaged in a SOIC 24-pin premolded plastic housing measuring 15.0×8.5×4.1mm. The combo sensor is compliant to the ISO26262 automotive safety standard and the AEC-Q100 stress test qualification requirements for electronic components used in automotive applications.

SCC2000 series is targeted for applications demanding high stability with tough environmental requirements. Typical applications include: IMUs for highly demanding environments, platform stabilization and control, machine control systems, Electronic Stability Control (ESC), Hill Start Assist (HSA), roll over detection and Navigation systems.

The report includes the analysis of all combo sensors in the SCC2000 series: the SCC2230-E02, SCC2230-D08 and SCC2130-D08. Also a comparison with previous generation SCC1300 series is included.

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Overview / Introduction

Physical Analysis (SCC2230-E02)

  • Physical Analysis Methodology
  • Package
    • Package Characteristics Marking & Pin-out
    • Package Opening
    • Package Cross-Section
  • ASIC Die
    • View, Dimensions & Marking
    • Delayering & Process Identification
    • Cross-Section
  • MEMS Gyro Die
    • View, Dimensions & Marking
    • MEMS Gyro Opening
    • MEMS Gyro Sensing Structure
    • MEMS Gyro Electrodes
    • MEMS Gyro Cross-Section
  • MEMS Accelerometer Die
    • View, Dimensions & Marking
    • MEMS Accelero Structure
    • MEMS Accelero Opening
    • MEMS Accelero Cross-Section

Physical Analysis of SCC2230-D08

Physical Analysis of SCC2130-D08

Comparison with Murata’s previous generation SCC1300

Manufacturing Process Flow

  • Global Overview
  • ASIC Front-End Process
  • MEMS Process Flow
  • Wafer Fabrication Units
  • Packaging Process Flow & Assembly Unit

Cost Analysis

  • Yields Hypotheses
  • ASIC Front-End Cost
  • ASIC Probe Test & Dicing Cost
  • ASIC Wafer & Die Cost
  • MEMS Gyro Front-End Cost
  • MEMS Gyro Front-End Cost per process steps
  • MEMS Gyro Probe Test & Dicing Cost
  • MEMS Gyro Wafer & Die Cost
  • MEMS Accelero Front-End Cost
  • MEMS Accelero Front-End Cost per process steps
  • MEMS Accelero Probe Test & Dicing Cost
  • MEMS Accelero Wafer & Die Cost
  • Back-End : Packaging Cost
  • Back-End : Final Test & Calibration Cost
  • SCC2230 Component Cost

Price Analysis

  • Murata Financial Results
  • SCC2230 Selling Price Estimation
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