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MEMS Pressure sensor

Melexis MLX90809

Product code
EUR 3 290
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The MLX90809 is an integrated relative pressure sensor for industrial and automotive applications in harsh environments. It operates over temperatures ranging from -40°C to 150°C and pressures between 0 and 1 bar, with an accuracy of 1.5%. The circuit is available with analog or digital SENT protocol output.

It is easy to use, factory calibrated, fully programmable and integrates analog functions like voltage regulators. The internal diagnostic functions ensure that measurement accuracy is maintained over the time.

Melexis uses smart packaging that is cheap and easy to integrate into a system. The relative pressure measurement uses a soft coating rather than complex packaging with manifolds. The coating protects the silicon die while allowing movement of the membrane.

The MLX90809 is the second generation integrated relative pressure sensor from Melexis. The company has more than 10 years’ experience in pressure sensors and more than 20 years’ experience in MEMS interface ICs.

This report presents a detailed analysis of the sensor structure and its cost.


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Overview / Introduction

  • Executive summary
  • MLX90809

Company profile

  • Melexis
  • X-Fab

Physical analysis

  • Physical analysis methodology
  • Package
    • Package
    • Package opening
    • Wire bonding
    • Package cross-section
  • Pressure sensor die
    • Sensor die view and dimensions
    • Pressure sensor views
    • Pressure sensor delayering and main blocks
    • Membrane
    • Piezo-resistors
    • Pressure sensor cross-section
    • Sensor die process characteristic

Sensor Manufacturing Process

  • Sensor Die Front-End Process and Fabrication Unit
  • Pressure Sensor Die Process
  • Packaging Process and Fabrication unit

Cost Analysis 

  • Synthesis of the Cost Analysis
  • Main Steps of Economic Analysis
  • Yield Explanation and Hypotheses
  • Sensor Die
    • CMOS Wafer Front-End Cost
    • Back Side Process Wafer Cost
    • Back Side Process Step Cost
    • Probe Test and Dicing
    • Sensor Die Wafer Cost
    • Sensor Die Cost
  • Packaged Component
    • Packaging Cost
    • Back End: Final Test
    • Component Cost

Estimated Selling Price

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