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MEMS IMU/Combo

InvenSense MPU-6500 6-Axis MEMS IMU

Publié
28/11/2013
Code produit
SP13142
Prix
2 490 EUR
Applications
Grand public
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In a market very disputed with STMicroelectronics and Bosch, InvenSense is still at the leading edge technically by providing 6-Axis IMU with a high level of integration.

With a package size of 3x3mm (45% footprint reduction compared to the previous generation), the MPU-6500 is the smallest 6-Axis IMU for consumer applications.

This package reduction has been made possible thanks to a new design of the 3-axis gyroscope which now uses a single structure vibratory compared to three different structures for the previous generation of gyros. This new design results in a shrink of 40% of the 3-axis gyro area. The second benefice of this new design is that cavities which were traditionally etched in the ASIC to allow MEMS structures moving are no longer used, thus resulting in cost reduction.

 

This report will provides a complete teardown of the MEMS IMU with:

  • Detailed photos
  • Material analysis
  • Schematic assembly description
  • Manufacturing Process Flow
  • In-depth manufacturing cost analysis
  • Supply chain evaluation
  • Selling price estimation

 

 

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Glossary

Overview/Introduction

  • Executive Summary
  • Reverse Costing Methodology

 InvenSense Company Profile

 Physical Analysis

  • Physical Analysis Methodology
  • Package
  • Package View, Dimensions & Pin-out
  • Package X-Ray
  • Package Opening
  • Package Cross-Section
  • Die
  • View, Dimensions & Marking
  • MEMS Sensing Area: Gyroscope
  • MEMS Sensing Area: X/Y-Axis Accelerometer
  • MEMS Sensing Area: Z-Axis Accelerometer
  • MEMS Cap
  • ASIC Delayering & Process
  • Die Cross-Section: ASIC
  • Die Cross-Section: MEMS
  • Die Cross-Section: Sensor
  • Die Cross-Section: Cap

 Comparison with previous generation

Manufacturing Process Flow

  • Global Overview
  • IC Front-End Process
  • MEMS Process Flow
  • Wafer Fabrication Unit
  • Packaging Process Flow
  • Package Assembly Unit

 Cost Analysis

  • Main steps of economic analysis
  • Yields Hypotheses
  • ASIC Front-End Cost
  • MEMS Front-End Cost
  • ASIC/MEMS Assembly Cost
  • MEMS Front-End Cost per process steps
  • MEMS Front-End: Equipment Cost per Family
  • MEMS Front-End: Material Cost per Family
  • Total Front-end Cost
  • Back-End 0 : Probe Test & Dicing
  • Wafer & Die Cost
  • Back-End : Packaging Cost
  • Back-End : Final Test & Calibration Cost
  • MPU-6500 Component Cost

 Estimated Price Analysis

  • InvenSense Financial Ratios
  • MPU-6500 Estimated Price

 

 

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