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MEMS manufacturing cost simulation tool

Last update date
3.3.9 (Database SP1)
Product code
Flyer Ask for info or demo

System Plus Consulting has developed a powerful cost simulation tool to evaluate the cost of any MEMS process or device:

From single chip to complex structures

MEMS CoSim+ is a process-based costing tool used to evaluate the manufacturingcost per wafer using your own inputs or using the pre-defined parameters included in the tool.

It is possible to enter any MEMS process flow.

MEMS CoSim+ includes a comprehensive database:

  • Fab Unit database
  • Equipment database
  • Consumables database
  • Wafer database
  • Process Flow database

It is a powerful tool designed for the MEMS Communityfeaturing:

  • Highlyflexible and a friendly hierarchical view where each process step can be moved, modified or deleted
  • Multiple process flows:

o Hierarchical description for multiple dies or processes
o Simulating cost according to different conditions (region, cleanroom , process, etc.)

  • Integrated equipment, wafer & materials databases.
  • An unlimited number of process steps or process flows to store in libraries
  • Up to five simultaneous scenarios allowing the user to run sensitivity analysis and compare results like yield improvement, manufacturing location impact on cost, etc.
  • Multiple subcontracting operations: costs of usually externalized operations can be precisely evaluated by setting their individual regional and commercial parameters.


An optional Mems process library and components library are available for accelerometers, gyroscopes, IMU, pressure sensors, microphones, oscillators, DMD, Inkjet Head…

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  • STMicroelectronics LIS3DH 3-axis
  • ADI ADXL362 2-axis
  • mCube MC3413 3-Axis
  • Bosch BMA222 3-Axis
  • Bosch BMA355 3-Axis
  • mCube MC3635 3-Axis
  • Bosch BMA250E
  • Colibrys VS1000 1-Axis


  • Bosch BMG160 3-axis
  • Sensonor STIM210 3-axis
  • STMicroelectronics L3GD20H 3-Axis
  • Maxim MAX21000 3-Axis
  • STMicroelectronics A3G4250D 3-Axis
  • InvenSense IDG-2030 2-Axis
  • STMicroelectronics L2G2IS 2-Axis


  • Texas Instruments DLP MEMS Digital Micro-mirror
  • STMicroelectronics IR Laser Projector


  • STMicroelectronics LSM9DS0 9-axis
  • InvenSense MPU9250 9-axis
  • Maxim MAX21100 6-Axis
  • Bosch BMI160 6-Axis
  • Bosch SMI130 6-Axis
  • STMicroelectronics LSM6DS3 6-Axis
  • Fairchild FIS1100 6-Axis
  • Murata SCC2000 Combo
  • Silicon Sensing CMS300 Combo
  • Bosch BMF055 6-Axis
  • InvenSense ICM-30630 6-Axis
  • STMicroelectronics LSM6DSL 6-Axis
  • InvenSense iPhone 7 Plus 6-Axis


  • Wispry A2101 MEMS Tunable Capacitor
  • Cavendish Kinetics 32CK417R Antenna Tuner
  • Avago AFEM-9040 FEM BAW Filter
  • Qorvo TQF6405 FEM BAW Filter


  • Discera DSC8002
  • Silicon labs Si104
  • SiTime SiT1552

Pressure Sensor

  • Infineon SP37 TPMS
  • Freescale FXTH87 TPMS
  • Bosch BMA280
  • Melexis MLX90809
  • Melexis MLX91802 TPMS
  • STMicroelectronics LPS22HB


  • STMicroelectronics MP45DT01
  • Analog Devices ADMP421e
  • Akustica AKU230
  • EPCOS T4060
  • AAC Acoustic iPhone 5S
  • Wolfson WM7121 & WM7132
  • InvenSense ICS-43432
  • Knowles iPhone 7 Plus
  • STMicroelectronics iPhone 7 Plus
  • Goertek iPhone 7 Plus

Humidity Sensor

  • Sensirion SHTC1
  • Bosch BME280 Humidity + Pressure
  • STMicroelectronics HTS221

Gas Sensor

  • ams AV-MLV-P2
  • Cambridge CMOS Sensor CCS801




  • STMicroelectronics THELMA process
  • Bosch surface micromachining process
  • Kionix dry micromachining process
  • Analog Devices iMEMS process
  • Analog Devices SOI micromachining process
  • MEMSIC CMOS/MEMS process
  • Freescale surface micromachining process
  • Freescale HARMEMS process
  • Murata 3D-MEMS process for automotive
  • Murata 3D-MEMS with SOI process for automotive
  • Sensonor bulk micromachining
  • mCube  3D MEMS process
  • Colibrys bulk Micromachining
  • Panasonic Piezo-resistive process


  • STMicroelectronics THELMA process
  • Bosch surface micromachining process
  • InvenSense Nasiri Process
  • Silicon Sensing bulk micromachining process
  • Murata 3D-MEMS with CSOI process
  • Maxim PSM-X2 process
  • Sensonor bulk micromachining process
  • Fairchild bulk micomachining process
  • Panasonic PZT Tuning Fork process


  • Texas Instruments DLP process
  • STMicroelectronics micro-mirror process


  • Bosch Fluxgate process
  • Honeywell AMR process
  • Yamaha GMR over CMOS process


  • Wispry MEMS over CMOS process
  • Cavendish Kinetics MEMS over CMOS process
  • Avago FBAR process
  • Qorvo SMR-BAW process


  • SiTime MEMS First process
  • Discera micromachining with Silex Microsystems TSI process
  • SiLabs CMEMS process

Pressure Sensors

  • Freescale CMOS/MEMS process
  • Bosch APSM process
  • Sensonor bulk micromachining process
  • Denso bulk micromachining process
  • Infineon CMOS/MEMS process
  • STMicroelectronics VENSENS process
  • Infineon bulk micromachining process
  • Melexis CMOS/MEMS process
  • Melexis bulk micromachining process


  • Knowles SiSonic MEMS process
  • Omron micromachining process
  • Akustica CMOS/MEMS process
  • Infineon micromachining process
  • Wolfson micromachining process
  • InvenSense micromachining process
  • STMicroelectronics micromachining process

Humidity Sensor

  • STMicroelectronics micromachining process
  • Boch thin film process
  • Sensirion process
  • Texas Instruments process
  • MEAS process
  • ALPS process
  • Silicon Labs process

Gas Sensor

  • ams micromachining process
  • Cambridge CMOS Sensor micromachining process

No files for download yet.

Do the tools include a component library?
The standard package doesn’t include a component library. But, you can add a component library with additional charges.


Do the tools include a process library?
The standard package doesn’t include any process library. But, you can add a process library with additional charges.


Since I have to detail all the process steps, do I get cost details at each step of the process?
Yes, our CoSim+ tools will provide you cost details at each step of the process.


How many process steps can I add to simulate my cost?
You can add unlimited process steps.


How can I learn to use the tools?
All tools include a helper. In CoSim+, you have a PDF file to guide you.
If needed, when you buy one of our tools, you can schedule a one-hour training session via WebEx with our engineers. You can also purchase an on-site training session if needed.


What kind of devices can I simulate with MEMS CoSim+?
You can simulate almost all sensor devices: inertial, environmental, microphone, BAW filter, oscillator and micro-mirror.


What kind of packaging can I simulate with MEMS CoSim+?
You can simulate leadframe based packages, including premold, SOIC, and QFN; laminate based, including LGA and BGA; and Wafer-Level Packaging.


Which technologies can I simulate with MEMS CoSim+?
You can simulate several technologies like Surface Micromachining, Bulk Micromachining, SOI Micromachining, CMOS/MEMS and MEMS over CMOS.


Can I simulate integrated circuits with MEMS CoSim+?
No, you can simulate integrated circuits only with MEMS Price+ and IC Price+.



What is the difference between the site license and the corporate license?
The site license is for all employees in just one location. The corporate license is for all employees from the same company worldwide.


Once I get the license, do I need to pay something else?
The license includes maintenance for the first year. After the first year, if you wish to keep receiving our support and updates, you will need to pay the maintenance fees only. It will cost between 1,000€ and 3,500€ depending on your license type and tool.


Why should I pay for maintenance after the first year? Can I get maintenance for free?
Thanks to the maintenance, you get updates to the tools and database every year. Maintenance also includes support from our team.

The first year, the update is included in the license fees. You don’t have to add any other fee. However, after this first year, you will have to purchase our yearly maintenance to get our tools and database updates.


Can I test the tools before buying it?
System Plus Consulting doesn’t provide any trial version but you can schedule a one-hour WebEx demo with the team to get a better understanding of which tool you might need.



You still have questions, we have answered more of them, just click on the below button to consult them.
Otherwise contact us:

Mre FAQ 

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